ITEM METADATA RECORD
Title: Laser-annealed junctions with advanced CMOS gate stacks for 32nm node: perspectives on device performance and manufacturability
Authors: Ortolland, C
Noda, T
Chiarella, T
Kubicek, S
Kerner, C
Vandervorst, Wilfried
Opdebeeck, A
Vrancken, C
Horiguchi, N
de Potter de ten Broeck, M
Aoulaiche, M
Rosseel, E
Felch, S
Absil, P
Schreutelkamp, R
Biesemans, Samuel
Hoffmann, T #
Issue Date: 2008
Publisher: IEEE Computer Society Press
Host Document: Proceedings - Great Lakes Symposium on VLSI pages:186-187
Conference: Symposium on VLSI Technology location:Honolulu, HI, USA date:17-20 June 2008
ISSN: 1066-1395
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section
# (joint) last author

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