Title: Toward extending the capabilties of scanning spreading resistance microscopy for fin field-effect-transistor-based structures
Authors: Mody, Jay ×
Eyben, P.
Augendre, E.
Richard, O.
Vandervorst, Wilfried #
Issue Date: Jan-2008
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:26 issue:1 pages:351-356
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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