Title: Atomic layer deposition of hafnium oxide on Ge and GaAs substrates: precursors and surface preparation
Authors: Delabie, Annelies
Brunco, D.
Conard, T.
Favia, P.
Bender, H.
Franquet, A.
Sioncke, S.
Vandervorst, Wilfried
Van Elshocht, S.
Heyns, Marc
Meuris, M.
Kim, E.
McIntyre, P.
Saraswat, K.
LeBeau, J.
Cagnon, J.
Stemmer, S.
Tsai, W. #
Issue Date: 2008
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:155 issue:12 pages:H937-H944
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
Department of Materials Engineering - miscellaneous
# (joint) last author

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