|ITEM METADATA RECORD
|Title: ||Litho variations and their impact on the electrical yield of a 32nm node 6TSRAM cell design for manufacturability through design-proces integration II|
|Authors: ||Verhaegen, Staf|
Rieger, Michael #
|Issue Date: ||2008 |
|Host Document: ||SPIE 2008 vol:6925 pages:6925R--12|
|Conference: ||SPIE 2008 date:maart 2008|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||ESAT - MICAS, Microelectronics and Sensors|
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