Title: Litho variations and their impact on the electrical yield of a 32nm node 6TSRAM cell design for manufacturability through design-proces integration II
Authors: Verhaegen, Staf
Cosemans, Stefan
Mircea, Dusa
Marchal, Pol
Nackaerts, Axel
Vandenberghe, Geert
Dehaene, Wim
Singh, Vivek
Rieger, Michael #
Issue Date: 2008
Host Document: SPIE 2008 vol:6925 pages:6925R--12
Conference: SPIE 2008 date:maart 2008
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
# (joint) last author

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