Title: Interface properties improvement of Ge/Al2O3 and Ge/GeO2/Al2O3 gate stacks using molecular beam deposition
Authors: Bellenger, Florence
Merckling, Clement
Penaud, Julien
Houssa, Michel
Caymax, Matty
Meuris, Marc
De Meyer, Kristin
Heyns, Marc #
Issue Date: Oct-2008
Publisher: ECS
Host Document: Physics and Technology of High-K Gate Dielectrics 6 vol:16 issue:5 pages:411-422
Conference: Fall ECS Meeting location:Honolulu, USA date:13-15 October 2008
ISBN: 978-1-56677-651-6
ISSN: 1938-5862
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Semiconductor Physics Section
Department of Materials Engineering - miscellaneous
# (joint) last author

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