Title: HfO2 high-k dielectrics on high mobility semiconductors by atomic oxygen beam assisted deposition
Authors: Dimoulas, A
Mavrou, G
Vellianitis, G
Evangelou, E
Houssa, Michel
Caymax, M #
Issue Date: 2005
Publisher: MRS
Conference: MRS Spring Meeting location:San Francisco date:28 march-1st april 2005
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Semiconductor Physics Section
# (joint) last author

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