Title: Charge trapping and interface state generation in 6H-SiC MOS structures
Authors: Afanas'ev, Valeri ×
Bassler, M.
Pensl, G.
Schulz, M. #
Issue Date: 1995
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:28 pages:197-200
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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