Title: Combined electron spin resonance and capacitance-voltage analysis of hydrogen annealing induced positive charge in buried SiO2
Authors: Vanheusden, K. ×
Stesmans, Andre
Afanas'ev, Valeri #
Issue Date: 1995
Publisher: American Institute of Physics
Series Title: Journal of Applied Physics vol:77 issue:6 pages:2419-2424
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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