Title: Necessity of hydrogen for fluorine activation in Si/SiO2 structures
Authors: Afanas'ev, Valeri ×
deNijs, J. M. M.
Balk, P. #
Issue Date: 1993
Publisher: American Institute of Physics
Series Title: Applied Physics Letters vol:63 issue:21 pages:2949-2951
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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