ITEM METADATA RECORD
Title: Point defect generation in SiO2 by interaction with SiO at elevated temperatures
Authors: Stesmans, Andre ×
Afanas'ev, Valeri #
Issue Date: 1997
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:36 pages:201-204
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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