Title: (100) and (110) Si surface orientation: impact on bias temperature instabilities in HfSiON/SiON/TiN MOSFETs
Authors: Aoulaiche, M
Houssa, Michel
De Gendt, Stefan
Groeseneken, Guido
Maes, Herman
Heyns, Marc #
Issue Date: 2006
Publisher: IEEE
Conference: Semiconductor Interface Specialists Conference location:San Diego date:december 2006
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Semiconductor Physics Section
Molecular Design and Synthesis
Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
Department of Materials Engineering - miscellaneous
# (joint) last author

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