Title: Impact of nitridation on negative and positive charge buildup in SiC gate oxides
Authors: Rozen, J. ×
Dhar, S.
Wang, S.
Afanas'ev, Valeri
Pantelides, S. T.
Williams, J. R.
Feldman, L. C. #
Issue Date: 2009
Publisher: Trans Tech Publications
Host Document: Materials Science Forum vol:600-603 pages:803-806
ISSN: 0255-5476
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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