Title: H2/D2 isotopic effect on negative bias temperature instability in SiOx/HfSiON/TaN gate stacks
Authors: Houssa, Michel
Aoulaiche, M
Stesmans, Andre
De Gendt, Stefan
Groeseneken, Guido
Heyns, Marc #
Issue Date: 2005
Publisher: IEEE
Conference: IEEE SISC edition:36th location:Washington DC date:december 2005
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Semiconductor Physics Section
Molecular Design and Synthesis
Electrical Engineering - miscellaneous
Department of Materials Engineering - miscellaneous
# (joint) last author

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