Title: High-k gate dielectrics on Ge(100) - effective electrical passivation using germanium oxide
Authors: Delabie, Annelies
Bellenger, F
Houssa, Michel
Conard, T
Van Elshocht, S
Caymax, M
Heyns, Marc
Meuris, M #
Issue Date: 2007
Conference: Atomic Layer Deposition Conference location:San Diego date:june 2007
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Semiconductor Physics Section
Department of Materials Engineering - miscellaneous
# (joint) last author

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