Title: Wafer bonding induced degradation of thermal silicon dioxide layers on silicon
Authors: Afanas'ev, Valeri ×
Ericsson, P.
Bengtsson, S.
Andersson, M. O. #
Issue Date: 1995
Publisher: American Institute of Physics
Series Title: Applied Physics Letters vol:66 issue:13 pages:1653-1655
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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