Title: Defect generation in high-k gate dielectrics under electrical stress: the impact of hydrogen
Authors: Houssa, Michel
Heyns, Marc
Stesmans, Andre #
Issue Date: 2004
Conference: CECAM Workshop on Atomic Processes at Semiconductor-Oxide Interfaces location:Lyon date:13-15 September 2004
Article number: Invited Paper
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Semiconductor Physics Section
Department of Materials Engineering - miscellaneous
# (joint) last author

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