Title: Charge instability of bonded silicon dioxide layer induced by wet processing
Authors: Afanas'ev, Valeri ×
Revesz, A. G.
Brown, G. A.
Hughes, H. L. #
Issue Date: 1995
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:142 issue:6 pages:1983-1986
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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