Title: Degradation of the thermal oxide of the Al/SiO2/Si system due to vacuum ultraviolet radiation
Authors: Afanas'ev, Valeri ×
deNijs, J. M. M.
Balk, P.
Stesmans, Andre #
Issue Date: 1995
Publisher: American Institute of Physics
Series Title: Journal of Applied Physics vol:78 pages:6481-6490
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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