Title: Silicon clusters as photoasctive traps in buried oxide layers of SIMOX structures
Authors: Fedoseenko, S. I. ×
Adamchuk, V. K.
Afanas'ev, Valeri #
Issue Date: 1993
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:22 pages:367-370
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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