Title: Si-passivation layer in Ge-MOSFETs: Process window for optimal performances
Authors: Mitard, J
De Jaeger, B
Eneman, G
Brunco, D
Winderickx, G
Pourtois, G
Houssa, Michel
Meuris, M
Heyns, Marc #
Issue Date: 2008
Publisher: MRS
Conference: Spring MRS Meeting location:San Francisco date:march 2008
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Semiconductor Physics Section
Department of Materials Engineering - miscellaneous
# (joint) last author

Files in This Item:

There are no files associated with this item.


All items in Lirias are protected by copyright, with all rights reserved.