Title: Defect generation in high-k gate stacks: Characterization and modelling
Authors: Houssa, Michel
Autran, J.L.
Stesmans, Andre
Heyns, Marc #
Issue Date: 2002
Publisher: ECS
Conference: ECS Meeting edition:202th location:Salt Lake City date:20-25 October 2002
Article number: Invited Paper
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Semiconductor Physics Section
Department of Materials Engineering - miscellaneous
# (joint) last author

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