|ITEM METADATA RECORD
|Title: ||SiO2 as insulator for SiC devices|
|Authors: ||Harris, C. I. ×|
Afanas'ev, Valeri #
|Issue Date: ||1997 |
|Series Title: ||Microelectronic Engineering vol:36 pages:167-174|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Semiconductor Physics Section|
× corresponding author|
# (joint) last author|
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