Title: Physics of SiC processing
Authors: Pensl, G. ×
Afanas'ev, Valeri
Bassler, M.
Frank, T.
Laube, M.
Weidner, M. #
Issue Date: 2000
Publisher: Trans Tech Publications
Series Title: Materials science forum vol:338 issue:2 pages:831-838
ISSN: 0255-5476
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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