Title: Impact of high-k properties on MOSFET electrical characteristics
Authors: Pantisano, Luigi
Ragnarsson, Lars
Houssa, Michel
Degraeve, Robin
Groeseneken, Guido
Schram, Tom
De Gendt, Stefan
Heyns, Marc
Afanas'ev, Valeri
Issue Date: 2006
Publisher: Springer Verlag
Host Document: Defects in high-k gate dielectric stacks pages:97-108
ISBN: 978-1-4020-4365-9
Publication status: published
KU Leuven publication type: IHb
Appears in Collections:Semiconductor Physics Section
Electrical Engineering - miscellaneous
Molecular Design and Synthesis
Department of Materials Engineering - miscellaneous

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