Title: Simple and robust air gap-based MEMS technology for RF-applications
Authors: Ekkels, P.
Rottenberg, X.
Puers, Robert
Tilmans, H.
Issue Date: 2008
Host Document: Memswave Conference
Conference: Memswave Conference location:Heraklion, Kreta date:June 2008
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors

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