Title: MEMS in post-processed standard CMOS
Authors: Garcia Bardon, M.
Neves, P.
Puers, Robert
Van Hoof, Christiaan #
Issue Date: 2008
Host Document: Micromechanics Europe Workshop pages:299-302
Conference: Micromechanics Europe Workshop edition:19 location:Aachen, Germany date:28-30 Sep.2008
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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