Title: Residual stress in sputtered silicon carbide layers
Authors: Driesen, Maarten
Puers, Robert #
Issue Date: 2008
Host Document: Micromechanics Europe Workshop pages:397-400
Conference: Micromechanics Europe Workshop edition:19 location:Aachen, Germany date:28-30 Sep.2008
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
# (joint) last author

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