|ITEM METADATA RECORD
|Title: ||Residual stress in sputtered silicon carbide layers|
|Authors: ||Driesen, Maarten|
Puers, Robert #
|Issue Date: ||2008 |
|Host Document: ||Micromechanics Europe Workshop pages:397-400|
|Conference: ||Micromechanics Europe Workshop edition:19 location:Aachen, Germany date:28-30 Sep.2008|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||ESAT - MICAS, Microelectronics and Sensors|
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