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Title: Zeolite Low-k Film Properties Dependence on Nanocrystal Size
Authors: Eslava Fernandez, Salvador ×
Baklanov, Mikhail
Iacopi, Francesca
Brongersma, S.
Kirschhock, Christine
Maex, Karen #
Issue Date: 2006
Publisher: MRS
Host Document: MRS Symposium Proceedings vol:914 pages:421-426
Conference: MRS Spring meeting location:San Francisco date:17-21 April
Article number: 0914-F03-08
Abstract: Spin-on pure-silica-zeolite MFI films consist of zeolite nanocrystals embedded in a compacted silica matrix of zeolite primary nanoparticles. They appear to be promising as a low-k material due to their good mechanical properties and high microporosity, parallel to their intrinsic low k-value. Results are promising but the implementation of this material is still far away. To contribute to the implementation we present a study on the final film properties depending on the zeolite MFI nanocrystal size. Different techniques are used for the characterization: Dynamic Light Scattering, X-ray diffraction, Scanning Electron Microscopy, Nitrogen adsorption, EllipsoPorosimetry using toluene and NanoIndentation. The results show a clear dependence of the film properties on the nanocrystal size. Clearly, smaller nanocrystals provide better homogeneity, smaller pore size and higher mechanical properties. However, due to the hydrophilicity of the silica matrix lower k-values are only obtained for larger zeolite nanocrystals which provide with higher crystallinity in the films.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Centre for Surface Chemistry and Catalysis
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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