Title: Characterisation and control of a pneumatic microactuator with an integrated inductive position sensor
Authors: De Volder, MichaĆ«l ×
Coosemans, Johan
Puers, Robert
Reynaerts, Dominiek #
Issue Date: Feb-2008
Publisher: Elsevier Science SA
Series Title: Sensors and Actuators A-Physical vol:141 pages:192-200
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Production Engineering, Machine Design and Automation (PMA) Section
× corresponding author
# (joint) last author

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