Title: Applied Physics Review: Internal photoemission at interfaces of high-k insulators with semiconductors and metals
Authors: Afanas'ev, Valeri ×
Stesmans, Andre #
Issue Date: Oct-2007
Publisher: American Institute of Physics
Series Title: Journal of Applied Physics vol:102 issue:8 pages:1-28
Article number: 081301
Abstract: Internal photoemission spectroscopy provides the most straightforward way to characterize the relative energies of electron states at interfaces of insulators with metals and semiconductors by measuring the spectral onset of electron/hole photoemission from one solid into another. The article reviews the application of this technique for characterization of advanced nanometer-thin insulators prospected to be used in microelectronic devices. Fundamental aspects and technical features of the internal photoemission experiments are discussed together with basic electronic properties of a number of investigated high-permittivity insulating films and their interfaces in semiconductor heterostructures. Significant differences are found in the electronic properties of nanometer-thin amorphous insulating layers as compared to the known bulk phase characteristics. The band alignment at the interfaces of these insulators with metals is found to be highly sensitive to the surface preparation procedures, while at semiconductor/oxide interfaces the parameters of occurring interlayers affect the energy barriers only marginally. The latter finding is in favour of the models describing the band offsets at semiconductor/insulator interfaces on the basis of the bulk density of electron states. Deviation of metal/oxide interfaces from this simple behaviour is explained by (unintentional) formation of a polarization layer at the interface which may contain uncompensated charges and dipoles affecting the barrier height.
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science