Title: A hydraulic micro-actuator with an integrated inductive position sensor
Authors: De Volder, Michael ×
Ceyssens, Frederik
Coosemans, Johan
Moers, Ton
Smal, Oliver
Peirs, Jan
Puers, Robert
Raucent, Benoit
Reynaerts, Dominiek #
Issue Date: 11-Dec-2006
Publisher: SPIE
Conference: Smart Materials, NanoandSmart materials, nano- and Micro-Smart Systems location:Adelaide, Australia date:10-13 december 2006
Article number: 6415-15
Abstract: An important technological barrier in the development of
microrobotic systems is the lack of compact sensor-actuator systems.
This paper presents a hydraulic microactuator with an integrated
inductive position sensor. Such a positioning system offers
great opportunities for all devices that need to control a large number of degrees of freedom in a restricted volume. The final
objective for this research is to develop a miniature sensor-actuator
system with an actuation force of 1 N and a positioning
accuracy of 100 μm.
The actuator described in this paper is a miniaturized piston-cylinder
hydraulic actuator. The main advantage of these actuators
is their high force and power density at microscale. The development
of microseals is however challenging from both design and
fabrication point of view. The actuator investigated in this paper
is sealed by clearance seals. The outside diameter of the actuator
is 1.4 mm and the length 15 mm. The stroke is 10 mm, and the
actuator is able to generate forces of more than 0.4 N at a pressure
of 550 kPa
The position sensor consists of two coils wound around the cylinder
of the actuator. The measurement principle is based on the
change in coupling factor between the coils as the piston moves
in the actuator. The sensor is extremely small since one layer of
40 μm copper wire is sufficient to achieve a resolution of 10 mm
over the total stroke. Special attention has been paid to the material
selection and to the thermal stability of the sensor.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Production Engineering, Machine Design and Automation (PMA) Section
× corresponding author
# (joint) last author

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