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Title: Growth of dysprosium-, scandium-, and hafnium-based third generation high-kappa dielectrics by atomic vapor deposition
Authors: Adelmann, Christoph ×
Lehnen, Peer
Van Elshocht, Sven
Zhao, Chao
Brijs, Bert
Franquet, Alexis
Conard, Thierry
Roeckerath, Martin
Schubert, J. rgen
Boissiere, Olivier
Lohe, Christoph
De Gendt, Stefan #
Issue Date: Oct-2007
Publisher: Wiley-v c h verlag gmbh
Series Title: Chemical vapor deposition vol:13 issue:10 pages:567-573
Abstract: Thin dysprosium-, scandium-, and hafnium-based oxide dielectric films are deposited by atomic vapor deposition (AVD) using tris(6-ethyl-2,2-dimethyl-3,5-decanedionato) dysprosium [Dy(EDMDD)(3)], tris(6-ethyl-2,2-dimethyl-3,5-decanedionato) scandium [Sc(EDMDD)(3)], and bis(tert-butoxide) bis(methoxymethyl propanoxide) hafnium [Hf(O'Bu)(2)(mmp)(2)] as precursors. Spectroscopic ellipsometry (SE), Rutherford backscattering (RBS) spectrometry, and X-ray photoemission spectroscopy (XPS) demonstrate good control of the thickness and composition of the films. In particular, ternary and quaternary oxide alloys of any desired composition are grown. X-ray diffraction (XRD) shows that the (DY0.5SC0.5)(2)O-3 films are amorphous as grown, whereas the (Dy0.5Hf0.5)(4)O-7 and (SC0.5Hf0.5)(4)O-7 films are crystalline. The crystal structures of DyHf1-xOy and ScxHf1-xOy change from monoclinic to cubic around x similar to 0.1.
ISSN: 0948-1907
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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