Journal of materials research vol:10 issue:1 pages:119-125
Physical vapor deposited TiN coatings oxidized by solar beam heat treatment in air were examined by microprobe Raman spectroscopy. The Raman spectra of TiN treated at 400-degrees-C indicated incipient oxidation by the presence of anatase TiO2 and additionally showed a broadband feature around the forbidden TiN vibrational mode. Inhomogeneous mixtures of rutile TiO2 and small amounts of anatase polymorph (<10%) were detected for the treatments at 600-degrees-C only during the initial stage of oxidation. Prolonged treatment at 600-degrees-C resulted in a complete anatase-to-rutile conversion. Rutile was identified as the single product of oxidation of the TiN samples treated at 800-degrees-C. Peak analysis of the rutile spectra revealed no substantial spectral shifts, demonstrating an oxide growth of nearly stoichiometric rutile with an estimated composition in the range of TiO2+/-0.02. The Raman scattered light intensity could be correlated with the rutile layer thickness.