ITEM METADATA RECORD
Title: Two component additive plating for through silicon via filling
Authors: Lühn, Ole
Radisic, A.
Vereecken, P.
Van Hoof, Christiaan
Celis, Jean-Pierre
Swinnen, B.
Ruythooren, W. #
Issue Date: 2008
Host Document: Two component additive plating for through silicon via filling
Conference: Advanced Metallization Conference (AMC) location:San Diego date:23-25 September 2008
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Department of Materials Engineering - miscellaneous
Chemical and Extractive Metallurgy Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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