Title: AlCuMgMn micro-tensile samples - Mechanical characterization of MEMS materials at micro-scale
Authors: Modlinski, Robert ×
Puers, Robert
De Wolf, Ingrid #
Issue Date: May-2008
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A-Physical vol:143 issue:1 pages:120-128
Abstract: Measuring mechanical properties at the micro-scale is essential to understand and fabricate reliable MEMS. In this paper we present a tensile testing system and test samples on the micro-scale. The test samples have a dog-bone like structure. They were designed to mimic fundamental and standardized macro-tensile test samples.
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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