Title: Interconnect for out-of-plane MEMS assembly
Authors: Aarts, Arno
Neves, H.
Puers, Robert
Van Hoof, Christiaan #
Issue Date: Jun-2008
Host Document: Interconnect Technology Conference, 2008. IITC 2008. International pages:132-134
Conference: IICT 2008 location:US date:2-4 June 2008
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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