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Title: Evidence of large voids in pure-silica-zeolite low-k dielectrics synthesized by spin-on of nanoparticle suspensions
Authors: Eslava Fernandez, Salvador ×
Baklanov, Mikhail R
Neimark, Alexander V
Iacopi, Francesca
Kirschhock, Christine
Maex, Karen
Martens, Johan #
Issue Date: Aug-2008
Publisher: Wiley-VCH
Series Title: Advanced Materials vol:20 issue:16 pages:3110-3116
Abstract: Spin-on pure-silica-zeolite or Silicalite films are currently considered as outstanding low-k materials because of their stiffness and ultralow dielectric constant. It is shown that spin-on Silicalite films with low k values unavoidably contain cavities tens of nanometers wide, representing a considerable challenge in their application as on-chip interconnects.
ISSN: 0935-9648
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Centre for Surface Chemistry and Catalysis
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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