Title: Leveling of microvias by electroplating for wafer-level-packaging
Authors: Lühn, Ole ×
Celis, Jean-Pierre
Van Hoof, Christiaan
Baert, K.
Ruythooren, W. #
Issue Date: 2007
Publisher: Electrochemical Society, Inc
Series Title: Electrochemical Society Transactions - ECS Transactions vol:6 issue:8 pages:123-133
ISSN: 1938-5862
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Department of Materials Engineering - miscellaneous
Chemical and Extractive Metallurgy Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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