Title: Fabrication, modelling and characterization of MEMS piezoelectric vibration harvesters
Authors: Renaud, M ×
Karakaya, K
Sterken, Tom
Fiorini, P
Van Hoof, Christiaan
Puers, Robert #
Issue Date: 2008
Publisher: Elsevier science sa
Series Title: Sensors and actuators. A: Physical issue:145-146 pages:380-386
Abstract: Piezoelectric converters designed for harvesting energy from mechanical vibrations have been fabricated by micromachining technologies. They are characterized by applying a sinusoidal oscillation as mechanical input and by using a resistive load to measure the output power of the system. A maximum output power of 40 mu W has been measured for a PZT based harvester excited by an input vibration having a frequency of 1.8 kHz and an amplitude of 180 nm. Preliminary experimental results on AlN based devices are also presented. A model capable of estimating the output power as a function of material parameters and device dimensions has been developed. Theoretical estimations have been compared with experimental results. (c) 2007 Elsevier B.V All rights reserved.
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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