ITEM METADATA RECORD
Title: Optical pressure sensor integrated on a fiber
Authors: Ceyssens, Frederik ×
Driesen, Maarten
Van Nuland, Tony
Puers, Robert #
Issue Date: Sep-2008
Conference: Eurosensors edition:2008 location:Dresden date:8-10 september 2008
Abstract: Focused ion beam processing was combined with sputtering to construct a miniature optical pressure sensor at the distal end of an optical fiber. By depositing a silicon oxide membrane on a silicon oxide fiber, a monolithic sensor could be made. Besides the extremely small size this has the advantage that thermal mismatch will be lower when used in high-temperature applications.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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