Title: Hole trapping in thin ALCVD layers of Al2O3, ZrO2 on (100)Si
Authors: Afanas'ev, Valeri
Stesmans, Andre #
Issue Date: 2001
Host Document: 32nd IEEE semiconductor interface specialists conference, Washington, D.C., USA, 29 November - 1 December 2001
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Semiconductor Physics Section
# (joint) last author

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