|ITEM METADATA RECORD
|Title: ||Hole trapping in thin ALCVD layers of Al2O3, ZrO2 on (100)Si|
|Authors: ||Afanas'ev, Valeri|
Stesmans, Andre #
|Issue Date: ||2001 |
|Host Document: ||32nd IEEE semiconductor interface specialists conference, Washington, D.C., USA, 29 November - 1 December 2001|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Semiconductor Physics Section|
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