Title: Annealing induced degradation of thermal SiO3 on (100)Si: atomic assessment by electron spin resonance
Authors: Stesmans, Andre
Nouwen, Bert
Pierreux, Dieter
Afanas'ev, Valeri #
Issue Date: 2001
Host Document: 32nd IEEE semiconductor interface specialists conference, Washington, D.C., USA, 29 November - 1 December 2001
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Semiconductor Physics Section
# (joint) last author

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