|ITEM METADATA RECORD
|Title: ||Economical shallow emitter formation by plasma immersion ion implantation and RTA processes|
|Authors: ||Pintér, I|
Adriaenssens, Guy #
|Issue Date: ||1998 |
|Publisher: ||Office for official publications of the European Communities|
|Host Document: ||2nd world conference on photovoltaic solar energy conversion: proceedings of the international conference held at Vienna, Austria, 6-10 July 1998 pages:1475-1478|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Semiconductor Physics Section|
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