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Title: Economical shallow emitter formation by plasma immersion ion implantation and RTA processes
Authors: Pintér, I
Dücsö, C
Khanh, NQ
Ádám, M
Makaró, Z
Bársony, I
Sivoththaman, S
Poortmans, J
Adriaenssens, Guy #
Issue Date: 1998
Publisher: Office for official publications of the European Communities
Host Document: 2nd world conference on photovoltaic solar energy conversion: proceedings of the international conference held at Vienna, Austria, 6-10 July 1998 pages:1475-1478
ISBN: 92-828-5419-1
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Semiconductor Physics Section
# (joint) last author

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