Title: A novel approach to characterization of a low-k dielectric polymer surface
Authors: Hoyas, A.M ×
Schuhmacher, J
Baklanov, M
Whelan, C.M
Celis, Jean-Pierre
Maex, Karen #
Issue Date: Dec-2002
Conference: PhD Day location:KU Leuven, Heverlee, Belgium date:11 December 2002
Description: Poster
Publication status: published
KU Leuven publication type: AMa
Appears in Collections:Chemical and Extractive Metallurgy Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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