Title: Structural properties of plasma polymerized a-Si1-x Cx:H coatings grown by an r.f. ICP source
Authors: Vanhulsel, A ×
Kuypers, S
Dekempeneer, E
Kemps, R
Wegener, W
Celis, Jean-Pierre #
Issue Date: 1999
Publisher: Société Française du Vide
Host Document: Proc. CIP'99, 12th International Colloquium on Plasma Processes pages:70-72
Conference: International Colloquium on Plasma Processes edition:12 location:Antibes, Juan-les-Pins, France date:6-10 June 1999
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Chemical and Extractive Metallurgy Section (-)
× corresponding author
# (joint) last author

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