Title: Nanotribology of MEMS/NEMS
Authors: Achanta, Satish
Celis, Jean-Pierre
Issue Date: 2007
Host Document: Fundamentals of Friction and Wear on the Nanoscale edition:Chapter 23 pages:521-548
Description: Series: NanoScience and Technology
ISBN: 978-3-540-36806-9
Publication status: published
KU Leuven publication type: IHb
Appears in Collections:Chemical and Extractive Metallurgy Section (-)

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