Title: Characterization of the etching of Ge sacrificial layers for surface micromachining of MEMS
Authors: Hellín Rico, Raquel ×
Du Bois, Bert
Celis, Jean-Pierre
Witvrouw, Ann #
Issue Date: Sep-2004
Conference: MME 2004, MicroMechanics Europe Workshop edition:15 location:Leuven, Belgium date:Sept 5-7 2004
Description: Poster presentation
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Chemical and Extractive Metallurgy Section (-)
Surface and Interface Engineered Materials
Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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