Title: Defects in stacks of Si with nanometre thick high-kappa dielectric layers: characterization and identification by electron spin resonance
Authors: Stesmans, Andre
Afanas'ev, Valeri
Issue Date: 2003
Publisher: Institute of Physics
Host Document: High-k gate dielectrics pages:190-216
Description: Contribution to the book 'High k Gate Dielectrics'
ISBN: 0750309067
Publication status: published
KU Leuven publication type: IHb
Appears in Collections:Semiconductor Physics Section

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