Title: Structuring of thin TiN ceramic coatings with photon and particle beams
Authors: Celis, Jean-Pierre
Franck, M
Gasser, A
Kreutz, E.W
Pattyn, Hugo
Roos, J.R
Wehner, M
Wissenbach, K #
Issue Date: Jun-1991
Host Document: Proc. Kongress Lasers in der Fertigung pages:1-8
Conference: location:München, Germany date:11-12 June 1991
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Chemical and Extractive Metallurgy Section (-)
Nuclear and Radiation Physics Section
# (joint) last author

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