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Title: Properties of ultrathin high-kappa dielectrics on Si probed by electron spin resonance-active defects: interfaces and interlayers
Authors: Stesmans, Andre
Afanas'ev, Valeri
Issue Date: 2003
Host Document: 'Silicon Nitride and Silicon Dioxide Thin Insulating Films VII pages:66-78
Description: Contribution to the book 'Silicon Nitride and Silicon Dioxide Thin Insulating Films VII
ISBN: 1-56677-347-4
Publication status: published
KU Leuven publication type: IHb
Appears in Collections:Semiconductor Physics Section

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